Georgia Institute of Technology College of Engineering 10 courses 12 total credits
Micro Electro Mechanical Systems (MEMS) is an interdisciplinary field related to technologies used to fabricate nano to microscale devices and system-on-a-chip. The MEMS devices and systems embed electrical, mechanical, chemical, and hybrid mechanisms to realize devices and systems for a broad array of applications such as physical sensors, biomedical systems, and complex multi-functional nano-micro systems. MEMS combine expertise from many disciplines, including but not limited to all fields of engineering, biology, chemistry, informatics, medicine, and physics.Typical MEMS devices combine sensing, processing and/or actuating functions.They typically combine two or more electrical, mechanical, biological, magnetic, optical orchemical properties on a single microchip.
| Total Credits | 12 credits |
Program of Study
| Code | Course Title | Credits |
|---|---|---|
| CHBE 6229 | Introduction to MEMS | 3 |
| CHBE 6460 | Microelectromechanical Devices | 3 |
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