The University of Alabama 3 credits MTE
This course will cover fundamental technology involved in thin film processing. Plasma deposition and etch technology will be discussed. The basics of plasma processing equipment will be detailed, with special emphasis on sputtering tools. A range of thin film applications will be explored, with examples of magnetics, semiconductor, optical, and medical applications. The fundamentals of process optimization using a Design of Experiments will be taught with a test case of process optimization for the final exam.
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