University of Arizona 2 credits Materials Science & Engr
The objective of the course is to teach five different unit operations that are relevant to the fabrication of semiconductor devices. The unit operations that will be covered are: Thermal Oxidation, Lithography, Deposition, Plasma Etching, and Surface Preparation (Cleaning and Wet Etching). Graduate students will be required to analyze the data at a greater depth, interpret the results and fit the data to mathematical models.
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