Drexel University 3 credits MEM
This course focuses on the fundamentals of microfabrication technologies. The materials, principles, and applications of silicon-based microfabrication technologies such as photolithography, wet/dry etching, deposition techniques, surface micromachining, and polymer micromachining are covered. This course also includes two lab sessions through which students have hands-on experiences in microfabrication.
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