The University of Alabama 3 credits ME
Microelectromechanical Systems (MEMS) are miniature devices comprising of integrated mechanical (levers, springs, deformable membranes, vibrating structures, etc.) and electrical (resistors, capacitors, inductors, etc.) components designed to work in concert to sense and report on the physical properties of their immediate or local environment, or, when signaled to do so, to perform controlled physical interaction or actuation with their immediate or local environment. Microfabrication technology is the science behind this miniaturization. Most microfabrication techniques have similar roots to those developed originally for the fabrication of integrated circuits. MEMS and Microfabrication cut across a large number of industries and applications, which is part of why their potential is so compelling. Lightweight computers, cellular phones, digital cameras, microneedles for painless drug deliveries, airbag sensors, etc. would not be here without advancements in MEMS and microfabrication technology. This course brings together the basic understanding of various microfabrication processes, different MEMS devices, and how they can be exploited in a wide range of engineering applications. The physics behind the operation of different fabrication tools will be covered, and the fabrication and operation of real-world examples will be explained.
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