University of South Florida 3 credits EEE
Introduction to MEMS and microfabrication techniques and processes as well as basic design principles of MEMS sensors and actuators. The course concentrates on how MEMS devices and microsystems are microfabricated based on batch-production compatible semiconductor foundry process technologies and the fundamental operation principles of microsystems. Prerequisite: None Corequisite: None Co-Prerequisite(s): None USF College of Engineering | Department of Electrical Engineering Credit Hours: 3
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