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ECE 871

Micro-electro-mechanical Systems Fabrication

Michigan State University 3 credits Electrical and Computer Engineering

Course Description

Design, simulation, fabrication and testing of integrated microsystems. Development of a complete microsystem containing sensors and actuators using Silicon On Glass (SOG) MEMS process. Basic E/D MOS circuits chips will designed and simulated but will not be fabricated. Fabricated MEMS chips will be tested.

Code
ECE 871
Credits
3
Subject
Electrical and Computer Engineering

Programs That Include This Course

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