University of Illinois Urbana-Champaign 3 credits Electrical and Computer Engineering
Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems. Same as ME 485. 3 undergraduate hours. 3 graduate hours. Prerequisite: Restricted to Seniors or Graduate students.
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