Integrated Circuit Nanomanufacturing Techniques

Course Description

Examine integrated circuit processing; crystal growth and wafer preparation; epitaxial growth; oxidation, diffusion, and ion implantation; thin-film deposition techniques; and lithography and etching. Electrical and Computer Engineering 440 and Electrical Engineering 440 may not both be counted. Three lecture hours and three laboratory hours a week for one semester. Pre/Corequisites: Credit with a grade of at least a C- for Mathematics 427J or 427K; credit with a grade of at least a C- for Physics 303E, or Physics 303L and 105N or 103N; and credit with a grade of at least C- or registration for Aerospace Engineering 333T, Biomedical Engineering 333T, Chemical Engineering 333T, Civil Engineering 333T, Electrical and Computer Engineering 333T (or Electrical Engineering 333T), Engineering Studies 333T, Mechanical Engineering 333T, Petroleum and Geosystems Engineering 333T, or Business Administration 324H.

Code

ECE 440

Credits

4

Subject

Electrical and Computer Engineering

Programs That Include This Course

• Minor Semiconductor Science and Engineering: Circuits and Systems Minor
• Minor Semiconductor Science and Engineering: Heterogeneous Integration Minor
• Minor Semiconductor Science and Engineering: Semiconductor Devices Minor
• Minor Semiconductor Science and Engineering: Semiconductor Manufacturing Minor