University of California, Los Angeles 3 credits Chemical Engineering
Lecture, four hours; outside study, five hours. Enforced requisite: course 101C. Enforced corequisite: course 104CL. Basic engineering principles of semiconductor unit operations, including fabrication and characterization of semiconductor devices. Investigation of processing steps used to make CMOS devices, including wafer cleaning, oxidation, diffusion, lithography, chemical vapor deposition, plasma etching, metallization, and statistical design of experiments and error analysis. Presentation of student results in both written and oral form. Letter grading.
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