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BE 489A

Fabrication Techniques for Micro- and Nanodevices

University of Arizona 3 credits Aerospace & Mechanical Engr

Course Description

This course tackles the techniques for the design, fabrication, and testing of traditional microelectromechanical systems (MEMS) and nanodevices. Each student will be required to participate in weekly laboratory sessions, to keep a laboratory notebook, and to submit a project report (25% Honors final grade;15% Undergraduate final grade) focusing on the design, fabrication, and testing of a MEMS device. Honors students receive additional homework assignments typically involving derivation or proof of a theory presented in class. Additionally, Honors students are asked to complete an independent MEMS/NEMS design, while undergraduates can use an existing device design. Grading differences are reflected in the syllabus.

Code
BE 489A
Credits
3
Subject
Aerospace & Mechanical Engr

Programs That Include This Course

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